11/30/2011	7:55:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	7:55:56 AM	Recipe started at 7:55 AM
11/30/2011	7:55:56 AM	Helium valve closed
11/30/2011	7:55:56 AM	H2 valve closed
11/30/2011	7:55:56 AM	BCl3 valve closed
11/30/2011	7:55:56 AM	PH3 valve closed
11/30/2011	7:55:56 AM	SiCl4 pre valve closed
11/30/2011	7:55:56 AM	SiCl4 post valve closed
11/30/2011	7:55:56 AM	Main Vac valve closed
11/30/2011	7:55:56 AM	Bypass valve closed
11/30/2011	7:55:56 AM	Bubbler valve closed
11/30/2011	7:55:56 AM	Helium MFC set to  0.000000
11/30/2011	7:55:56 AM	H2 MFC set to  0.000000
11/30/2011	7:55:56 AM	BCl3 MFC set to  0.000000
11/30/2011	7:55:56 AM	PHl3 MFC set to  0.000000
11/30/2011	7:55:56 AM	SiCl4 MFC set to  0.000000
11/30/2011	7:55:56 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	7:55:56 AM	Tube furnace set to 0
11/30/2011	7:55:59 AM	H2 valve closed
11/30/2011	7:55:59 AM	BCl3 valve closed
11/30/2011	7:55:59 AM	PH3 valve closed
11/30/2011	7:55:59 AM	SiCl4 pre valve closed
11/30/2011	7:55:59 AM	SiCl4 post valve closed
11/30/2011	7:55:59 AM	Main Vac valve closed
11/30/2011	7:55:59 AM	Bypass valve closed
11/30/2011	7:55:59 AM	Bubbler valve closed
11/30/2011	7:55:59 AM	Helium valve opened
11/30/2011	7:55:59 AM	Helium MFC set to  500.000000
11/30/2011	7:55:59 AM	H2 MFC set to  0.000000
11/30/2011	7:55:59 AM	BCl3 MFC set to  0.000000
11/30/2011	7:55:59 AM	PHl3 MFC set to  0.000000
11/30/2011	7:55:59 AM	SiCl4 MFC set to  0.000000
11/30/2011	7:55:59 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	7:55:59 AM	Tube furnace set to 0
11/30/2011	7:57:04 AM	Helium valve closed
11/30/2011	7:57:04 AM	H2 valve closed
11/30/2011	7:57:04 AM	BCl3 valve closed
11/30/2011	7:57:04 AM	PH3 valve closed
11/30/2011	7:57:04 AM	SiCl4 pre valve closed
11/30/2011	7:57:04 AM	SiCl4 post valve closed
11/30/2011	7:57:04 AM	Main Vac valve closed
11/30/2011	7:57:04 AM	Bypass valve closed
11/30/2011	7:57:04 AM	Bubbler valve closed
11/30/2011	7:57:04 AM	Helium MFC set to  0.000000
11/30/2011	7:57:04 AM	H2 MFC set to  0.000000
11/30/2011	7:57:04 AM	BCl3 MFC set to  0.000000
11/30/2011	7:57:04 AM	PHl3 MFC set to  0.000000
11/30/2011	7:57:04 AM	SiCl4 MFC set to  0.000000
11/30/2011	7:57:04 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	7:57:04 AM	Tube furnace set to 0
11/30/2011	7:57:05 AM	Run finished at 7:57 AM
11/30/2011	7:57:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	8:01:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2011	8:01:45 AM	Recipe started at 8:01 AM
11/30/2011	8:01:45 AM	Helium valve closed
11/30/2011	8:01:45 AM	H2 valve closed
11/30/2011	8:01:45 AM	BCl3 valve closed
11/30/2011	8:01:45 AM	PH3 valve closed
11/30/2011	8:01:45 AM	SiCl4 pre valve closed
11/30/2011	8:01:45 AM	SiCl4 post valve closed
11/30/2011	8:01:45 AM	Main Vac valve closed
11/30/2011	8:01:45 AM	Bubbler valve closed
11/30/2011	8:01:45 AM	Bypass valve opened
11/30/2011	8:01:45 AM	Helium MFC set to  0.000000
11/30/2011	8:01:45 AM	H2 MFC set to  0.000000
11/30/2011	8:01:45 AM	BCl3 MFC set to  0.000000
11/30/2011	8:01:45 AM	PHl3 MFC set to  0.000000
11/30/2011	8:01:45 AM	SiCl4 MFC set to  0.000000
11/30/2011	8:01:45 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	8:01:46 AM	Tube furnace set to 0
11/30/2011	8:03:08 AM	Helium valve closed
11/30/2011	8:03:08 AM	H2 valve closed
11/30/2011	8:03:08 AM	BCl3 valve closed
11/30/2011	8:03:08 AM	PH3 valve closed
11/30/2011	8:03:08 AM	SiCl4 pre valve closed
11/30/2011	8:03:08 AM	SiCl4 post valve closed
11/30/2011	8:03:08 AM	Main Vac valve closed
11/30/2011	8:03:08 AM	Bubbler valve closed
11/30/2011	8:03:08 AM	Bypass valve opened
11/30/2011	8:03:08 AM	Helium MFC set to  0.000000
11/30/2011	8:03:08 AM	H2 MFC set to  0.000000
11/30/2011	8:03:08 AM	BCl3 MFC set to  0.000000
11/30/2011	8:03:08 AM	PHl3 MFC set to  0.000000
11/30/2011	8:03:08 AM	SiCl4 MFC set to  0.000000
11/30/2011	8:03:08 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	8:03:08 AM	Tube furnace set to 0
11/30/2011	8:04:08 AM	Helium valve closed
11/30/2011	8:04:08 AM	H2 valve closed
11/30/2011	8:04:08 AM	BCl3 valve closed
11/30/2011	8:04:08 AM	PH3 valve closed
11/30/2011	8:04:08 AM	SiCl4 pre valve closed
11/30/2011	8:04:08 AM	SiCl4 post valve closed
11/30/2011	8:04:08 AM	Bypass valve closed
11/30/2011	8:04:08 AM	Bubbler valve closed
11/30/2011	8:04:08 AM	Main Vac valve opened
11/30/2011	8:04:08 AM	Helium MFC set to  0.000000
11/30/2011	8:04:08 AM	H2 MFC set to  0.000000
11/30/2011	8:04:08 AM	BCl3 MFC set to  0.000000
11/30/2011	8:04:08 AM	PHl3 MFC set to  0.000000
11/30/2011	8:04:08 AM	SiCl4 MFC set to  0.000000
11/30/2011	8:04:08 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	8:04:08 AM	Tube furnace set to 0
11/30/2011	8:04:09 AM	Run finished at 8:04 AM
11/30/2011	8:04:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2011	9:01:17 AM	Main Vac valve closed
11/30/2011	9:01:40 AM	Main Vac valve opened
11/30/2011	9:06:43 AM	Recipe started at 9:06 AM
11/30/2011	9:06:43 AM	Helium valve closed
11/30/2011	9:06:43 AM	H2 valve closed
11/30/2011	9:06:43 AM	BCl3 valve closed
11/30/2011	9:06:43 AM	PH3 valve closed
11/30/2011	9:06:43 AM	SiCl4 pre valve closed
11/30/2011	9:06:43 AM	SiCl4 post valve closed
11/30/2011	9:06:43 AM	Main Vac valve closed
11/30/2011	9:06:43 AM	Bypass valve closed
11/30/2011	9:06:43 AM	Bubbler valve closed
11/30/2011	9:06:43 AM	Helium MFC set to  0.000000
11/30/2011	9:06:43 AM	H2 MFC set to  0.000000
11/30/2011	9:06:43 AM	BCl3 MFC set to  0.000000
11/30/2011	9:06:43 AM	PHl3 MFC set to  0.000000
11/30/2011	9:06:43 AM	SiCl4 MFC set to  0.000000
11/30/2011	9:06:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	9:06:43 AM	Tube furnace set to 0
11/30/2011	9:06:46 AM	Helium valve closed
11/30/2011	9:06:46 AM	BCl3 valve closed
11/30/2011	9:06:46 AM	PH3 valve closed
11/30/2011	9:06:46 AM	SiCl4 pre valve closed
11/30/2011	9:06:46 AM	SiCl4 post valve closed
11/30/2011	9:06:46 AM	Main Vac valve closed
11/30/2011	9:06:46 AM	Bypass valve closed
11/30/2011	9:06:46 AM	Bubbler valve closed
11/30/2011	9:06:46 AM	H2 valve opened
11/30/2011	9:06:46 AM	Helium MFC set to  0.000000
11/30/2011	9:06:46 AM	H2 MFC set to  500.000000
11/30/2011	9:06:46 AM	BCl3 MFC set to  0.000000
11/30/2011	9:06:46 AM	PHl3 MFC set to  0.000000
11/30/2011	9:06:46 AM	SiCl4 MFC set to  0.000000
11/30/2011	9:06:46 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	9:06:46 AM	Tube furnace set to 0
11/30/2011	9:07:55 AM	Helium valve closed
11/30/2011	9:07:55 AM	BCl3 valve closed
11/30/2011	9:07:55 AM	PH3 valve closed
11/30/2011	9:07:55 AM	SiCl4 pre valve closed
11/30/2011	9:07:55 AM	SiCl4 post valve closed
11/30/2011	9:07:55 AM	Main Vac valve closed
11/30/2011	9:07:55 AM	Bypass valve closed
11/30/2011	9:07:55 AM	H2 valve opened
11/30/2011	9:07:55 AM	Bubbler valve opened
11/30/2011	9:07:55 AM	Helium MFC set to  0.000000
11/30/2011	9:07:55 AM	H2 MFC set to  500.000000
11/30/2011	9:07:55 AM	BCl3 MFC set to  0.000000
11/30/2011	9:07:55 AM	PHl3 MFC set to  0.000000
11/30/2011	9:07:55 AM	SiCl4 MFC set to  0.000000
11/30/2011	9:07:55 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	9:07:55 AM	Tube furnace set to 0
11/30/2011	9:07:56 AM	Helium valve closed
11/30/2011	9:07:56 AM	BCl3 valve closed
11/30/2011	9:07:56 AM	PH3 valve closed
11/30/2011	9:07:56 AM	SiCl4 pre valve closed
11/30/2011	9:07:56 AM	SiCl4 post valve closed
11/30/2011	9:07:56 AM	Main Vac valve closed
11/30/2011	9:07:56 AM	Bypass valve closed
11/30/2011	9:07:56 AM	H2 valve opened
11/30/2011	9:07:56 AM	Bubbler valve opened
11/30/2011	9:07:56 AM	Helium MFC set to  0.000000
11/30/2011	9:07:56 AM	H2 MFC set to  500.000000
11/30/2011	9:07:56 AM	BCl3 MFC set to  0.000000
11/30/2011	9:07:56 AM	PHl3 MFC set to  0.000000
11/30/2011	9:07:56 AM	SiCl4 MFC set to  0.000000
11/30/2011	9:07:56 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	9:07:56 AM	Tube furnace set to 1000
11/30/2011	9:32:56 AM	Helium valve closed
11/30/2011	9:32:56 AM	PH3 valve closed
11/30/2011	9:32:56 AM	Main Vac valve closed
11/30/2011	9:32:56 AM	Bypass valve closed
11/30/2011	9:32:56 AM	H2 valve opened
11/30/2011	9:32:56 AM	BCl3 valve opened
11/30/2011	9:32:56 AM	SiCl4 pre valve opened
11/30/2011	9:32:56 AM	SiCl4 post valve opened
11/30/2011	9:32:56 AM	Bubbler valve opened
11/30/2011	9:32:56 AM	Helium MFC set to  0.000000
11/30/2011	9:32:56 AM	H2 MFC set to  450.000000
11/30/2011	9:32:56 AM	BCl3 MFC set to  0.700000
11/30/2011	9:32:56 AM	PHl3 MFC set to  0.000000
11/30/2011	9:32:56 AM	SiCl4 MFC set to  50.000000
11/30/2011	9:32:56 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	9:32:56 AM	Tube furnace set to 1000
11/30/2011	10:02:56 AM	Helium valve closed
11/30/2011	10:02:56 AM	BCl3 valve closed
11/30/2011	10:02:56 AM	PH3 valve closed
11/30/2011	10:02:56 AM	SiCl4 pre valve closed
11/30/2011	10:02:56 AM	SiCl4 post valve closed
11/30/2011	10:02:56 AM	Main Vac valve closed
11/30/2011	10:02:56 AM	Bypass valve closed
11/30/2011	10:02:56 AM	H2 valve opened
11/30/2011	10:02:56 AM	Bubbler valve opened
11/30/2011	10:02:56 AM	Helium MFC set to  0.000000
11/30/2011	10:02:56 AM	H2 MFC set to  500.000000
11/30/2011	10:02:56 AM	BCl3 MFC set to  0.000000
11/30/2011	10:02:56 AM	PHl3 MFC set to  0.000000
11/30/2011	10:02:56 AM	SiCl4 MFC set to  0.000000
11/30/2011	10:02:56 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	10:02:56 AM	Tube furnace set to 750
11/30/2011	10:17:56 AM	H2 valve closed
11/30/2011	10:17:56 AM	BCl3 valve closed
11/30/2011	10:17:56 AM	PH3 valve closed
11/30/2011	10:17:56 AM	SiCl4 pre valve closed
11/30/2011	10:17:56 AM	SiCl4 post valve closed
11/30/2011	10:17:56 AM	Main Vac valve closed
11/30/2011	10:17:56 AM	Bypass valve closed
11/30/2011	10:17:56 AM	Helium valve opened
11/30/2011	10:17:56 AM	Bubbler valve opened
11/30/2011	10:17:56 AM	Helium MFC set to  500.000000
11/30/2011	10:17:56 AM	H2 MFC set to  0.000000
11/30/2011	10:17:56 AM	BCl3 MFC set to  0.000000
11/30/2011	10:17:56 AM	PHl3 MFC set to  0.000000
11/30/2011	10:17:56 AM	SiCl4 MFC set to  0.000000
11/30/2011	10:17:56 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	10:17:57 AM	Tube furnace set to 0
11/30/2011	10:37:57 AM	Helium valve closed
11/30/2011	10:37:57 AM	H2 valve closed
11/30/2011	10:37:57 AM	BCl3 valve closed
11/30/2011	10:37:57 AM	PH3 valve closed
11/30/2011	10:37:57 AM	SiCl4 pre valve closed
11/30/2011	10:37:57 AM	SiCl4 post valve closed
11/30/2011	10:37:57 AM	Main Vac valve closed
11/30/2011	10:37:57 AM	Bypass valve closed
11/30/2011	10:37:57 AM	Bubbler valve closed
11/30/2011	10:37:57 AM	Helium MFC set to  0.000000
11/30/2011	10:37:57 AM	H2 MFC set to  0.000000
11/30/2011	10:37:57 AM	BCl3 MFC set to  0.000000
11/30/2011	10:37:57 AM	PHl3 MFC set to  0.000000
11/30/2011	10:37:57 AM	SiCl4 MFC set to  0.000000
11/30/2011	10:37:57 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	10:37:57 AM	Tube furnace set to 0
11/30/2011	10:57:57 AM	Helium valve closed
11/30/2011	10:57:57 AM	H2 valve closed
11/30/2011	10:57:57 AM	BCl3 valve closed
11/30/2011	10:57:57 AM	PH3 valve closed
11/30/2011	10:57:57 AM	SiCl4 pre valve closed
11/30/2011	10:57:57 AM	SiCl4 post valve closed
11/30/2011	10:57:57 AM	Main Vac valve closed
11/30/2011	10:57:57 AM	Bubbler valve closed
11/30/2011	10:57:57 AM	Bypass valve opened
11/30/2011	10:57:57 AM	Helium MFC set to  0.000000
11/30/2011	10:57:57 AM	H2 MFC set to  0.000000
11/30/2011	10:57:57 AM	BCl3 MFC set to  0.000000
11/30/2011	10:57:57 AM	PHl3 MFC set to  0.000000
11/30/2011	10:57:57 AM	SiCl4 MFC set to  0.000000
11/30/2011	10:57:57 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	10:57:57 AM	Tube furnace set to 0
11/30/2011	10:59:25 AM	Helium valve closed
11/30/2011	10:59:25 AM	H2 valve closed
11/30/2011	10:59:25 AM	BCl3 valve closed
11/30/2011	10:59:25 AM	PH3 valve closed
11/30/2011	10:59:25 AM	SiCl4 pre valve closed
11/30/2011	10:59:25 AM	SiCl4 post valve closed
11/30/2011	10:59:25 AM	Main Vac valve closed
11/30/2011	10:59:25 AM	Bubbler valve closed
11/30/2011	10:59:25 AM	Bypass valve opened
11/30/2011	10:59:25 AM	Helium MFC set to  0.000000
11/30/2011	10:59:25 AM	H2 MFC set to  0.000000
11/30/2011	10:59:25 AM	BCl3 MFC set to  0.000000
11/30/2011	10:59:25 AM	PHl3 MFC set to  0.000000
11/30/2011	10:59:25 AM	SiCl4 MFC set to  0.000000
11/30/2011	10:59:25 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	10:59:26 AM	Tube furnace set to 0
11/30/2011	11:00:26 AM	Helium valve closed
11/30/2011	11:00:26 AM	H2 valve closed
11/30/2011	11:00:26 AM	BCl3 valve closed
11/30/2011	11:00:26 AM	PH3 valve closed
11/30/2011	11:00:26 AM	SiCl4 pre valve closed
11/30/2011	11:00:26 AM	SiCl4 post valve closed
11/30/2011	11:00:26 AM	Bypass valve closed
11/30/2011	11:00:26 AM	Bubbler valve closed
11/30/2011	11:00:26 AM	Main Vac valve opened
11/30/2011	11:00:26 AM	Helium MFC set to  0.000000
11/30/2011	11:00:26 AM	H2 MFC set to  0.000000
11/30/2011	11:00:26 AM	BCl3 MFC set to  0.000000
11/30/2011	11:00:26 AM	PHl3 MFC set to  0.000000
11/30/2011	11:00:26 AM	SiCl4 MFC set to  0.000000
11/30/2011	11:00:26 AM	Bypass solenoid MFC set to  0.000000
11/30/2011	11:00:26 AM	Tube furnace set to 0
11/30/2011	12:00:26 PM	Run finished at 12:00 PM
11/30/2011	1:09:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	1:09:33 PM	Recipe started at 1:09 PM
11/30/2011	1:09:33 PM	Helium valve closed
11/30/2011	1:09:33 PM	H2 valve closed
11/30/2011	1:09:33 PM	BCl3 valve closed
11/30/2011	1:09:33 PM	PH3 valve closed
11/30/2011	1:09:33 PM	SiCl4 pre valve closed
11/30/2011	1:09:33 PM	SiCl4 post valve closed
11/30/2011	1:09:33 PM	Main Vac valve closed
11/30/2011	1:09:33 PM	Bypass valve closed
11/30/2011	1:09:33 PM	Bubbler valve closed
11/30/2011	1:09:33 PM	Helium MFC set to  0.000000
11/30/2011	1:09:33 PM	H2 MFC set to  0.000000
11/30/2011	1:09:33 PM	BCl3 MFC set to  0.000000
11/30/2011	1:09:33 PM	PHl3 MFC set to  0.000000
11/30/2011	1:09:33 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:09:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:09:33 PM	Tube furnace set to 0
11/30/2011	1:09:36 PM	H2 valve closed
11/30/2011	1:09:36 PM	BCl3 valve closed
11/30/2011	1:09:36 PM	PH3 valve closed
11/30/2011	1:09:36 PM	SiCl4 pre valve closed
11/30/2011	1:09:36 PM	SiCl4 post valve closed
11/30/2011	1:09:36 PM	Main Vac valve closed
11/30/2011	1:09:36 PM	Bypass valve closed
11/30/2011	1:09:36 PM	Bubbler valve closed
11/30/2011	1:09:36 PM	Helium valve opened
11/30/2011	1:09:36 PM	Helium MFC set to  500.000000
11/30/2011	1:09:36 PM	H2 MFC set to  0.000000
11/30/2011	1:09:36 PM	BCl3 MFC set to  0.000000
11/30/2011	1:09:36 PM	PHl3 MFC set to  0.000000
11/30/2011	1:09:36 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:09:36 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:09:36 PM	Tube furnace set to 0
11/30/2011	1:10:39 PM	Helium valve closed
11/30/2011	1:10:39 PM	H2 valve closed
11/30/2011	1:10:39 PM	BCl3 valve closed
11/30/2011	1:10:39 PM	PH3 valve closed
11/30/2011	1:10:39 PM	SiCl4 pre valve closed
11/30/2011	1:10:39 PM	SiCl4 post valve closed
11/30/2011	1:10:39 PM	Main Vac valve closed
11/30/2011	1:10:39 PM	Bypass valve closed
11/30/2011	1:10:39 PM	Bubbler valve closed
11/30/2011	1:10:39 PM	Helium MFC set to  0.000000
11/30/2011	1:10:39 PM	H2 MFC set to  0.000000
11/30/2011	1:10:39 PM	BCl3 MFC set to  0.000000
11/30/2011	1:10:39 PM	PHl3 MFC set to  0.000000
11/30/2011	1:10:39 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:10:39 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:10:39 PM	Tube furnace set to 0
11/30/2011	1:10:40 PM	Run finished at 1:10 PM
11/30/2011	1:10:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	1:14:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2011	1:14:14 PM	Recipe started at 1:14 PM
11/30/2011	1:14:14 PM	Helium valve closed
11/30/2011	1:14:14 PM	H2 valve closed
11/30/2011	1:14:14 PM	BCl3 valve closed
11/30/2011	1:14:14 PM	PH3 valve closed
11/30/2011	1:14:14 PM	SiCl4 pre valve closed
11/30/2011	1:14:14 PM	SiCl4 post valve closed
11/30/2011	1:14:14 PM	Main Vac valve closed
11/30/2011	1:14:14 PM	Bubbler valve closed
11/30/2011	1:14:14 PM	Bypass valve opened
11/30/2011	1:14:14 PM	Helium MFC set to  0.000000
11/30/2011	1:14:14 PM	H2 MFC set to  0.000000
11/30/2011	1:14:15 PM	BCl3 MFC set to  0.000000
11/30/2011	1:14:15 PM	PHl3 MFC set to  0.000000
11/30/2011	1:14:15 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:14:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:14:15 PM	Tube furnace set to 0
11/30/2011	1:15:53 PM	Helium valve closed
11/30/2011	1:15:53 PM	H2 valve closed
11/30/2011	1:15:53 PM	BCl3 valve closed
11/30/2011	1:15:53 PM	PH3 valve closed
11/30/2011	1:15:53 PM	SiCl4 pre valve closed
11/30/2011	1:15:53 PM	SiCl4 post valve closed
11/30/2011	1:15:53 PM	Main Vac valve closed
11/30/2011	1:15:53 PM	Bubbler valve closed
11/30/2011	1:15:53 PM	Bypass valve opened
11/30/2011	1:15:53 PM	Helium MFC set to  0.000000
11/30/2011	1:15:53 PM	H2 MFC set to  0.000000
11/30/2011	1:15:53 PM	BCl3 MFC set to  0.000000
11/30/2011	1:15:53 PM	PHl3 MFC set to  0.000000
11/30/2011	1:15:53 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:15:53 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:15:53 PM	Tube furnace set to 0
11/30/2011	1:16:53 PM	Helium valve closed
11/30/2011	1:16:53 PM	H2 valve closed
11/30/2011	1:16:53 PM	BCl3 valve closed
11/30/2011	1:16:53 PM	PH3 valve closed
11/30/2011	1:16:53 PM	SiCl4 pre valve closed
11/30/2011	1:16:53 PM	SiCl4 post valve closed
11/30/2011	1:16:53 PM	Bypass valve closed
11/30/2011	1:16:53 PM	Bubbler valve closed
11/30/2011	1:16:53 PM	Main Vac valve opened
11/30/2011	1:16:53 PM	Helium MFC set to  0.000000
11/30/2011	1:16:53 PM	H2 MFC set to  0.000000
11/30/2011	1:16:53 PM	BCl3 MFC set to  0.000000
11/30/2011	1:16:53 PM	PHl3 MFC set to  0.000000
11/30/2011	1:16:53 PM	SiCl4 MFC set to  0.000000
11/30/2011	1:16:53 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	1:16:53 PM	Tube furnace set to 0
11/30/2011	1:16:54 PM	Run finished at 1:16 PM
11/30/2011	1:16:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2011	5:10:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	5:10:34 PM	Recipe started at 5:10 PM
11/30/2011	5:10:34 PM	Helium valve closed
11/30/2011	5:10:34 PM	H2 valve closed
11/30/2011	5:10:34 PM	BCl3 valve closed
11/30/2011	5:10:34 PM	PH3 valve closed
11/30/2011	5:10:34 PM	SiCl4 pre valve closed
11/30/2011	5:10:34 PM	SiCl4 post valve closed
11/30/2011	5:10:34 PM	Main Vac valve closed
11/30/2011	5:10:34 PM	Bypass valve closed
11/30/2011	5:10:34 PM	Bubbler valve closed
11/30/2011	5:10:34 PM	Helium MFC set to  0.000000
11/30/2011	5:10:34 PM	H2 MFC set to  0.000000
11/30/2011	5:10:34 PM	BCl3 MFC set to  0.000000
11/30/2011	5:10:34 PM	PHl3 MFC set to  0.000000
11/30/2011	5:10:34 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:10:34 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:10:34 PM	Tube furnace set to 0
11/30/2011	5:10:37 PM	H2 valve closed
11/30/2011	5:10:37 PM	BCl3 valve closed
11/30/2011	5:10:37 PM	PH3 valve closed
11/30/2011	5:10:37 PM	SiCl4 pre valve closed
11/30/2011	5:10:37 PM	SiCl4 post valve closed
11/30/2011	5:10:37 PM	Main Vac valve closed
11/30/2011	5:10:37 PM	Bypass valve closed
11/30/2011	5:10:37 PM	Bubbler valve closed
11/30/2011	5:10:37 PM	Helium valve opened
11/30/2011	5:10:37 PM	Helium MFC set to  500.000000
11/30/2011	5:10:37 PM	H2 MFC set to  0.000000
11/30/2011	5:10:37 PM	BCl3 MFC set to  0.000000
11/30/2011	5:10:37 PM	PHl3 MFC set to  0.000000
11/30/2011	5:10:37 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:10:37 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:10:37 PM	Tube furnace set to 0
11/30/2011	5:11:42 PM	Helium valve closed
11/30/2011	5:11:42 PM	H2 valve closed
11/30/2011	5:11:42 PM	BCl3 valve closed
11/30/2011	5:11:42 PM	PH3 valve closed
11/30/2011	5:11:42 PM	SiCl4 pre valve closed
11/30/2011	5:11:42 PM	SiCl4 post valve closed
11/30/2011	5:11:42 PM	Main Vac valve closed
11/30/2011	5:11:42 PM	Bypass valve closed
11/30/2011	5:11:42 PM	Bubbler valve closed
11/30/2011	5:11:42 PM	Helium MFC set to  0.000000
11/30/2011	5:11:42 PM	H2 MFC set to  0.000000
11/30/2011	5:11:42 PM	BCl3 MFC set to  0.000000
11/30/2011	5:11:42 PM	PHl3 MFC set to  0.000000
11/30/2011	5:11:42 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:11:42 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:11:42 PM	Tube furnace set to 0
11/30/2011	5:11:43 PM	Run finished at 5:11 PM
11/30/2011	5:11:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2011	5:14:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2011	5:14:58 PM	Recipe started at 5:14 PM
11/30/2011	5:14:58 PM	Helium valve closed
11/30/2011	5:14:58 PM	H2 valve closed
11/30/2011	5:14:58 PM	BCl3 valve closed
11/30/2011	5:14:58 PM	PH3 valve closed
11/30/2011	5:14:58 PM	SiCl4 pre valve closed
11/30/2011	5:14:58 PM	SiCl4 post valve closed
11/30/2011	5:14:58 PM	Main Vac valve closed
11/30/2011	5:14:58 PM	Bubbler valve closed
11/30/2011	5:14:58 PM	Bypass valve opened
11/30/2011	5:14:58 PM	Helium MFC set to  0.000000
11/30/2011	5:14:58 PM	H2 MFC set to  0.000000
11/30/2011	5:14:58 PM	BCl3 MFC set to  0.000000
11/30/2011	5:14:58 PM	PHl3 MFC set to  0.000000
11/30/2011	5:14:58 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:14:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:14:58 PM	Tube furnace set to 0
11/30/2011	5:16:38 PM	Helium valve closed
11/30/2011	5:16:38 PM	H2 valve closed
11/30/2011	5:16:38 PM	BCl3 valve closed
11/30/2011	5:16:38 PM	PH3 valve closed
11/30/2011	5:16:38 PM	SiCl4 pre valve closed
11/30/2011	5:16:38 PM	SiCl4 post valve closed
11/30/2011	5:16:38 PM	Main Vac valve closed
11/30/2011	5:16:38 PM	Bubbler valve closed
11/30/2011	5:16:38 PM	Bypass valve opened
11/30/2011	5:16:38 PM	Helium MFC set to  0.000000
11/30/2011	5:16:38 PM	H2 MFC set to  0.000000
11/30/2011	5:16:38 PM	BCl3 MFC set to  0.000000
11/30/2011	5:16:38 PM	PHl3 MFC set to  0.000000
11/30/2011	5:16:38 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:16:38 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:16:38 PM	Tube furnace set to 0
11/30/2011	5:17:38 PM	Helium valve closed
11/30/2011	5:17:38 PM	H2 valve closed
11/30/2011	5:17:38 PM	BCl3 valve closed
11/30/2011	5:17:38 PM	PH3 valve closed
11/30/2011	5:17:38 PM	SiCl4 pre valve closed
11/30/2011	5:17:38 PM	SiCl4 post valve closed
11/30/2011	5:17:38 PM	Bypass valve closed
11/30/2011	5:17:38 PM	Bubbler valve closed
11/30/2011	5:17:38 PM	Main Vac valve opened
11/30/2011	5:17:38 PM	Helium MFC set to  0.000000
11/30/2011	5:17:38 PM	H2 MFC set to  0.000000
11/30/2011	5:17:38 PM	BCl3 MFC set to  0.000000
11/30/2011	5:17:38 PM	PHl3 MFC set to  0.000000
11/30/2011	5:17:38 PM	SiCl4 MFC set to  0.000000
11/30/2011	5:17:38 PM	Bypass solenoid MFC set to  0.000000
11/30/2011	5:17:38 PM	Tube furnace set to 0
11/30/2011	5:17:39 PM	Run finished at 5:17 PM
11/30/2011	5:17:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
